ABBREVIATION DEFINITIONS SECS-II STREAM MESSAGE LIST GEM STATE MODELS EQUIPMENT CPABILITIES AND SCENARIOS GEM COMPLIANCE STATEMENT Equipment Capabilities and Scenarios This section describes the details of the capabilities required by GEM and provides scenarios for their use. Capabilities are operations performed by semiconductor manufacturing equipment. These operations are initiated through the communication interface using SECS-II messages. A scenario is a group of SECS-II messages arranged in a sequence to perform a capability.   The following capabilities are discussed :   Establish Communications Event Notification Dynamic Event Report Configuration Status Data Collection On-line Identification Alarm Management Remote Control Equipment Constants Process Program Management Equipment Terminal Services Error Messages Clock Control   Abbreviation Fundamental GEM Requirements Implemented GEM Compliant State Models SEMI Equipment Processing States   Equipment-Initiated S1, F13 / F14 Scenario   Event Notification On-line Identification   Error Messages   Documentation   Control (Operator-Initiated)     Additional Capabilities Implemented GEM Compliant Establish Communications Dynamic Event Report Configuration   Variable Data Collection   Trace Data Collection   Status Data Collection Alarm Management   Remote Control Equipment Constants Process Program Management Material Movement Equipment Terminal Services   Clock Limits Monitoring   Spooling   Control (Host-Initiated)   * This product of HANMI Semiconductor is protected by the property right of industry.