ABBREVIATION DEFINITIONS SECS-II STREAM MESSAGE LIST GEM STATE MODELS EQUIPMENT CPABILITIES AND SCENARIOS GEM COMPLIANCE STATEMENT SECS-II Stream Message List Capabilities Equipment Status Collection Event Equipment Control and Diagnostics Communication Failure Material Status Communication Fault Material Control Control Exception Reporting (equipment alarms) Communications State Mode Data Collection Control State Model Process Program Management Data Collection Control Program Transfer Event System Errors Event Data Collection Terminal Services Event Report Removed from the 1989 standard GEM Compliance Wafer Mapping Generic Equipment Mode Unformatted Data Set Transfers Host Object Services Processing State Model Recipe Management Recipe Processing Management Report Equipment Control and Diagnostics   * This product of HANMI Semiconductor is protected by the property right of industry.