ABBREVIATION DEFINITIONS SECS-II STREAM MESSAGE LIST GEM STATE MODELS EQUIPMENT CPABILITIES AND SCENARIOS GEM COMPLIANCE STATEMENT Abbreviation Abbreviation Description Version Source SECS-I SEMI Equipment Communication Standard 1, Message Transfer (SECS-I) SEMI E4-91 SEMI SECS-II SEMI Equipment Communication Standard 2, Message Contents (SECS-II) SEMI E5-95 SEMI SMS SEMI Equipment Communication Standard, Message Service (SMS) - Part 1, SMS Services SEMI E13-93 SEMI GEM SEMI Generic Model for Communications and Control of SEMI Equipment (GEM) SEMI E30-95 SEMI * This product of HANMI Semiconductor is protected by the property right of industry.