ABBREVIATION DEFINITIONS SECS-II STREAM MESSAGE LIST GEM STATE MODELS EQUIPMENT CPABILITIES AND SCENARIOS GEM COMPLIANCE STATEMENT Definitions Capabilities Capabilities are operations performed by Equipment. These operations are initiated through the communications interface using sequences of SECS-II messages (or scenarios). An example of a capability is the setting and clearing of alarms. Collection Event A collection event is an event (or grouping of related events) on the equipment that is considered to be significant to the host. Communication Failure A communication failure is said to occur when an established communications link is broken. In a SECS-I environment, this occurs when the protocol retry limit RTY is exceeded. Communication Fault A communication fault occurs when the equipment does not receive an expected message, or when either a transaction timer or a conversation timer expires. Control To control is to exercise directing influence. Communications State Mode A state model describing how the communications link between the equipment and the host application is established and maintained. The two defined states are DISABLED and ENABLED, the last with the two sub-states NOT COMMUNICATING and COMMUNICATING. Control State Model A state model describing who has control over the equipment. The two states are OFF LINE and ON LINE, the last with the two sub-states LOCAL and REMOTE. Data Collection Data collection is a capability which allows the host to monitor equipment activity via event reporting, trace data reporting, and query of selected data. Event An event is a detectable occurrence significant to the equipment. Event Data Collection The event based approach to data collection provides automatic notification to the host of equipment activities and is useful in monitoring the equipment and in maintaining the synchronization. The term event data collection refers to a capability. Event Report An indication of a collection event occurrence. An event report typically contains a predefined set of variables grouped as a single report. The term event report refers to a SECS-II conversation. GEM Compliance The term "GEM Compliance" is defined with respect to individual GEM capabilities to indicate adherence to the GEM standard for a specific capability. Section 8 includes more detail on GEM Compliance. Generic Equipment Mode The Generic Equipment Model is used as a reference model for any type of equipment. It contains functionality that can apply to most equipment, but does not address unique requirements of specific equipment. Host The SEMI E4 and E5 standards define Host as "the intelligent system that communicates with the equipment." Processing State Model A state model describing the processing states of the equipment. The four states are INIT, NOT READY, READY and EXECUTING. Recipe Process Program composed of setup parameters for processing a specific material without the calibration data. The recipe is done by the line engineer on the equipment and save to hard disk. Report A set of variables predefined by the equipment (canned report) or defined by the host via S2, F33/F34 transaction. Scenario A scenario is a group of SECS-II messages arranged in a sequence to perform a capability. Other information may also be included in a scenario for clarity. SECS-I SEMI Equipment Communications Standard I. This standard specifies a method for a message transfer protocol with electrical signal levels based upon EIA RS232-C. SECS-II SEMI Equipment Communications Standard II. This standard specifies a group of messages and the respective syntax and semantics for those messages relating to semiconductor manufacturing equipment control. State Model A State Model is a collection of states and state transitions that combine to describe the behavior of a system. This model includes definition of the conditions that delineatea state, the actions/reactions possible within a state, the events that trigger transitions to other states, and the process of transitioning between states. Variable Equipment item which contains information such as state or parameter value.   * This product of HANMI Semiconductor is protected by the property right of industry.